Research Engineer / Senior Research Engineer ─ BEOL Furnaces, (APM), IME

A*STAR • Singapore, Singapore • Posted June 25, 2026

About the Role

We are looking for a motivated Research & Technical Support Engineer/Scientist to develop, maintain, and support BEOL furnace processes including BEOL metal anneal, barrier/liner engineering, dielectric curing, hydrogen anneals, and stress?relief treatments. This role involves both fundamental materials science and hands?on tool/process ownership in a cleanroom research environment. You will collaborate with R&D teams working on advanced interconnect technologies, photonic integration, 3D integration, and novel dielectric/metallization schemes.


Job Responsibilities:


BEOL Furnace Process Development

  • Develop and optimize BEOL thermal processes including Metal anneal, Barrier/liner stabilization, Dielectric curing, Passivation and Stress?relief anneals
  • Perform tool qualification, recipe loading, chamber matching, SPC set up and contamination monitoring.

  • Troubleshoot process excursions an...